Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001) - Concepedia

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Depth profile investigation of the incorporated iron atoms during Kr+ ion beam sputtering on Si (001)

12

Citations

25

References

2012

Year

B. Khanbabaee, B. Arezki, Andreas Biermanns, M. Cornejo, D. Hirsch, Dirk Lützenkirchen−Hecht, Frank Frost, U. Pietsch

Thin Solid Films

Materials ScienceMaterials EngineeringIon ImplantationEngineeringPhysicsIncorporated Iron AtomsKr+ Ion BeamApplied PhysicsAtomic PhysicsDepth Profile InvestigationIon BeamVacuum DeviceIon EmissionMicroelectronicsMicrostructure

References

	Year	Citations

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