Dry Photochemical Etching of Metallic Films

Abstract

The illumination of a light sensitive polymer layer cast on top of a metallic film (Al or Bi) leads to etching of the metallic film; the light-sensitive layer consists of a polymer binder, including aromatic amines and hexabromodimethylsulfone; the additional use of an optical amplification process results in a new, dry, highly sensitive method of metallic film etching.