Concepedia

Observation and simulation of focused ion beam induced damage

C. Vieu, Gérard Assayag, J. Giérak

Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 1994 · 26 citations · 16 references

Concepts

EngineeringNuclear EngineeringPhysicsNuclear PhysicsPlasma PhysicsRadiation PhysicsIon ImplantationIonization ProcessesRadiation Damage In MaterialsRadiation HardeningRadiation-resistant MaterialsBeam DamageIon Beam IrradiationRadiation Damage Mechanisms

References

16

Crystalline to amorphous transformation in ion-implanted silicon: a composite model

John R. Dennis, Edward B. Hale · Journal of Applied Physics · 1978 · 281 citations

Natural Sciences, Materials Engineering, Materials Science +17

Calculation of projected ranges — analytical solutions and a simple general algorithm

J.P. Biersack · Nuclear Instruments and Methods · 1981 · 240 citations

Computing, Range Management, Optimization +6

Heavy-ion range profiles and associated damage distributions

K. B. Winterbon · Radiation Effects · 1972 · 198 citations

Natural Sciences, Nuclear Engineering, Physics +13

Recoil contribution to ion-implantation energy-deposition distributions

D.K. Brice · Journal of Applied Physics · 1975 · 120 citations

Engineering, Physics, Nuclear Physics +10

Atomic structure of ion implantation damage and process of amorphization in semiconductors

J. Narayan, D. Fathy, O.S. Oen et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 84 citations

Engineering, Materials Engineering, Materials Science +17