Effect of water vapor on the growth of aluminum oxide films by low pressure chemical vapor deposition - Concepedia

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Effect of water vapor on the growth of aluminum oxide films by low pressure chemical vapor deposition

38

Citations

14

References

1993

Year

J.S. Kim, H. A. Marzouk, P. J. Reucroft, J. D. Robertson, Charles E. Hamrin

Thin Solid Films

Materials EngineeringMaterials ScienceAluminium NitrideEngineeringSurface ScienceApplied PhysicsWater VaporChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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