Pd-based integrated optical hydrogen sensor on a silicon-on-insulator platform

Abstract

We have experimentally demonstrated a compact, integrated optical hydrogen sensor on a silicon-on-insulator platform. The sensor consists of silicon waveguide coated with a thin palladium film. The sensitivity and response time of the sensor was tested for volumetric hydrogen concentrations ranging from 0% to 4%. The proposed hydrogen sensor shows great potential as a building block for an optical nose capable of simultaneous detection of multiple gases as well as environmental effects such as temperature and humidity.