Microsystem Technologies · 2002 · 17 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceActuatorsElectronic MaterialsThin FilmsPiezoelectric MaterialsThin Film Mechanical PropertiesThin-film DepositionThin-film MaterialsPiezoelectric Thin FilmsThin-film Actuator MaterialsThin-film Piezoelectric ActuatorsThin-film Piezoelectric CeramicsThin-film Piezoelectrics