On the homogeneity of sputter-deposited ITO films Part I. Stress and microstructure - Concepedia

Concepedia

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On the homogeneity of sputter-deposited ITO films Part I. Stress and microstructure

116

Citations

15

References

1995

Year

T.J. Vink, W. Walrave, J. Daams, P. C. Baarslag, J. E. A. M. van den Meerakker

Thin Solid Films

Materials ScienceMaterial AnalysisEngineeringPhysicsSurface ScienceApplied PhysicsThin FilmsChemical DepositionMicroelectronicsChemical Vapor DepositionThin Film ProcessingMicrostructure

References

	Year	Citations

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