High emission current density microwave-plasma-grown carbon nanotube arrays by postdepositional radio-frequency oxygen plasma treatment

Abstract

Highly stable field emission current densities of more than 6A∕cm2 along with scalable total field emission currents of ∼300μA per 70μm diameter carbon nanotube (CNT)-covered electron emitter dot are reported. Microwave-plasma chemical vapor deposition, along with a novel catalyst sandwich structure and postdepositional radio-frequency (rf) oxygen plasma treatment lead to well-structured vertically aligned CNTs with excellent and scalable emission properties. Scanning electron and transmission electron microscope investigations reveal that postdepositional treatment reduces not only the number but modifies the structure of the CNTs. Well-structured microwave-plasma-grown nanotubes become amorphous during rf oxygen plasma treatment and the measured work functions of CNTs change from 4.6eVto4.0eV before and after treatment, respectively. Our experiments outline a novel fabrication route for structured CNT arrays with improved and scalable field emission characteristics.