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Impact ionization rate near thresholds in Si
41
Citations
12
References
1994
Year
Electrical EngineeringIon ImplantationEngineeringPhysicsIndirect Band StructureApplied PhysicsCondensed Matter PhysicsImpact Ionization RateAtomic PhysicsRadiation TransportIon Beam InstrumentationIon BeamSilicon On InsulatorIon EmissionIonization Model
The impact ionization rate in Si is determined by performing the full-band Monte Carlo simulations with an ionization model that takes into account the correct joint density of states of Si. The ionization model, which is a refined version of the previously reported one [N. Sano, M. Tomizawa, and A. Yoshii, Jpn. J. Appl. Phys. 30, 3662 (1991)], features a finer mesh spacing for discretizing the wave-vector space and a smaller energy interval for the energy-conserving δ function in the transition probability. The impact ionization rate shows significant anisotropy near thresholds (≤3 eV) associated with the complexity of the indirect band structure in Si. When the impact ionization rate is averaged over all directions, good agreement with that extracted from recent experiments [E. Cartier, M. V. Fischetti, E. A. Eklund, and F. R. McFeely, Appl. Phys. Lett. 62, 3339 (1993)] is obtained.
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