Precise Control over Molecular Dimensions of Block‐Copolymer Domains Using the Interfacial Energy of Chemically Nanopatterned Substrates

Abstract

Epitaxial assembly of block-copolymer films (see Figure) onto chemically nanopatterned substrates results in arrays of nanoscopic domains that are defect-free, oriented, and registered with the underlying substrate. The range of dimensions of features (or periodicity of structures) that can be patterned with perfection and registration strongly depends on the interfacial energy between the substrate and the polymer film.