Publication | Closed Access
Optical, structural and electrical properties of μc-Si:H films deposited by SiH4+H2
28
Citations
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References
2003
Year
Materials ScienceElectrical EngineeringOptical MaterialsEngineeringOptoelectronic MaterialsApplied PhysicsSurface ScienceSemiconductor MaterialOptoelectronic DevicesThin FilmsH FilmsElectrical PropertiesOptoelectronicsChemical Vapor Deposition
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