Publication | Closed Access
Thermal annealing study of carbon films formed by the plasma decomposition of hydrocarbons
57
Citations
7
References
1984
Year
Materials SciencePlasma DecompositionChemical EngineeringCarbon FilmsEngineeringCarbon-based MaterialApplied PhysicsCarbon BlackGrapheneNonthermal PlasmaPlasma ProcessingChemical Vapor Deposition
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