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Hydrogen quantification of magnetron sputtered hydrogenated amorphous carbon (a-C:H) coatings produced at various bias voltages and their tribological behavior under different humidity levels

Materials ScienceMaterials EngineeringAmorphous CarbonTribological CoatingEngineeringHydrogen QuantificationSurface ScienceApplied PhysicsTribological BehaviorHydrogenAmorphous SolidChemical Vapor DepositionHydrogen Embrittlement