The microhardness, electrical conductivity and temperature coefficient of resistance of reactively sputtered TiCxOyNz films - Concepedia

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The microhardness, electrical conductivity and temperature coefficient of resistance of reactively sputtered TiCxOyNz films

10

Citations

13

References

1983

Year

H. Fark, J. Chevallier, K. Reichelt, H. Dimigen, H. Hübsch

Thin Solid Films

Materials ScienceMaterial AnalysisEngineeringSpecific ResistanceSurface ScienceApplied PhysicsTemperature CoefficientElectrical ConductivityHigh-performance MaterialThin FilmsThin Film ProcessingTicxoynz Films

References

	Year	Citations

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