Self-assembled large-scale and cylindrical CuInSe₂quantum dots on indium tin oxide films

Abstract

CuInSe2 (CIS) quantum dots (QDs) have been prepared by radio-frequency reactive magnetron sputtering from a ternary compound target on glass substrates coated with indium tin oxide at low temperatures. Uniformly distributed CIS QDs with a regular shape can be grown in this way. The average lateral size of the dots can be varied between 40 and 80 nm by making appropriate choices of substrate temperature, power density, and total CIS coverage.