Advanced Materials · 1998 · 27 citations · 0 references
Natural SciencesMaterials EngineeringMaterials ScienceCondensed Matter PhysicsElectronic MaterialsThin FilmsSemiconductor Thin FilmsSuperconducting MaterialsSuperconducting Thin FilmsThin-film DepositionThin-film MaterialsHigh-temperature SuperconductivityHigh-temperature SuperconductorsMagnetron SputteringPower HandlingPulsed Laser DepositionSputteringSurface ResistanceThin-film Superconductors
High-quality films of several superconducting materials are finding increasing applications. Thin films of materials such as YBa2Cu3O7 (YBCO), Tl2Ba2CaCu2O8 (TBCCO), and (Tl,Pb)Sr2CaCu2O7 (TPSCCO) can be made by a variety of methods, including sputtering and pulsed laser deposition. Magnetron sputtering is now used exclusively by the authors, because it is reproducible, robust, amenable to scale-up, and practised throughout the semiconductor industry. Additionally, sputtered films have proven to have desirable properties in terms of microstructure, surface resistance, and power handling.