New Process Technologies for the Deposition of Semiconducting Metal Oxide Nanoparticles for Sensing

Abstract

Flame Spray Pyrolysis (FSP) is known to enable a direct deposition of a variety of nanoparticle materials onto various type of sensor substrates. Nevertheless, the directly deposited sensing layers come with intrinsic drawbacks such as high baseline resistivity and fragility, both associated to their extremely high porosity. Accordingly, here, we are showing that by applying a lamination process for the sensor preparation it is possible to overcome those problems. Compression leads to a lower baseline resistance, a gain in terms of sensor response and a more robust sensing layer, compared to the directly deposited counterpart.