Synthesis and characterization of crystalline films on silicon

Abstract

We report the successful experimental synthesis of nearly pure crystalline - and films on a Si(100) substrate by bias-assisted hot-filament chemical vapour deposition. Scanning electron microscopy shows that the substrate surface is covered by polycrystalline clusters in size with a density of . Relative N/C compositions in the range 1.34 - 2.5 were obtained by energy-dispersive x-ray analysis. The lattice parameters a = 7.06 Å and c = 2.72 Å for , and a = 6.48 Å and c = 4.71 Å for were determined both by x-ray diffraction and by transmission electron microscopy. A buffer layer of was found.