Ultra-thin Silicon Nitride Gate Dielectric For Deep-sub-micron CMOS Devices - Concepedia

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Ultra-thin Silicon Nitride Gate Dielectric For Deep-sub-micron CMOS Devices

18

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3

References

1997

Year

Khare, Xin Guo, Wang, ± Ma, Cui, Tamagawa, Halpern, Schmitt

Symposium on VLSI Technology

Deep-sub-micron Cmos DevicesElectrical EngineeringEngineeringNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronics

References

	Year	Citations

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