Thin Solid Films · 2010 · 26 citations · 21 references
Natural SciencesMaterials EngineeringMaterials ScienceMaterials ChemistryMetallurgySurface ScienceAlloysChemical Vapor DepositionMetalsPowder ProcessingSinteringAtmospheric Pressure Chemical Vapor DepositionCarbide-based MaterialsChemical Vapor Deposition MaterialsChemical Vapor Deposition PrecursorsLow-pressure Chemical Vapor Deposition
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Chemical vapour deposition of coatings
Kwang‐Leong Choy · Progress in Materials Science · 2003 · 1.6K citations
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Chemically vapor deposited Ti3SiC2
Takashi Goto, T. Hirai · Materials Research Bulletin · 1987 · 310 citations
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Thermal stability of Ti3SiC2 thin films
Jens Emmerlich, Denis Mušić, Per Eklund et al. · Acta Materialia · 2006 · 225 citations
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