Method for complex X‐ray diffraction analysis of TiN coatings

Abstract

Abstract A complex of X‐ray diffraction methods for study of polycrystalline thin layers is presented. It is based on the approximation of measured profiles by suitable analytical functions. An application to TiN coatings prepared by PVD method on high‐speed steel is presented. The necessity to investigate several diffraction parameters (position, integral intensity, breadth, asymmetry) of more reflections is emphasized.