Publication | Closed Access
Internal stress of vapour-deposited aluminium films: Effect of O2 and water vapour present during film deposition
43
Citations
20
References
1990
Year
Materials ScienceMaterials EngineeringVapour-deposited Aluminium FilmsAluminium NitrideEngineeringFilm DepositionCorrosionSurface ScienceApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film ProcessingMicrostructureInternal Stress
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