Publication | Closed Access
Nitrogen effect on the electrical properties of CNx thin films deposited by reactive magnetron sputtering
55
Citations
33
References
2005
Year
Materials ScienceCnx Thin FilmsElectrical EngineeringEngineeringNanotechnologyNanoelectronicsApplied PhysicsNitrogen EffectThin Film Process TechnologyThin FilmsThin Film ProcessingReactive Magnetron Sputtering
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