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Simultaneous measurement of several near-parallel surfaces with wavelength-shifting interferometry and a tunable phase-shifting method

EngineeringCoherent Gradient SensingMicroscopyOptical PropertiesCalibrationOptical TestingDiffractive OpticInterferometryPhotonic MetrologyWavelength-shifting InterferometrySeveral Near-parallel SurfacesInstrumentationOptical SystemsTunable Phase-shifting Method