Publication | Closed Access
High vacuum chemical vapor deposition of cubic SiC thin films on Si(001) substrates using single source precursor
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Citations
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References
2000
Year
Materials ScienceEngineeringSurface ScienceApplied PhysicsSemiconductor Device FabricationVacuum DeviceThin FilmsChemical Vapor DepositionThin Film ProcessingCarbideSingle Source Precursor
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