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Combinatorial fabrication and high-throughput characterization of a Ti–Ni–Cu shape memory thin film composition spread

Materials ScienceEngineeringCombinatorial FabricationNanotechnologyMaterials FabricationFabrication TechniqueApplied PhysicsHigh-performance MaterialThin Film Process TechnologyThin FilmsChemical Vapor DepositionHigh-throughput CharacterizationThin Film Processing