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Various chemical mechanisms for the crystal growth of III–V semiconductors using coordination compounds as starting material in the MOCVD process

Materials ScienceInorganic ChemistrySemiconductorsMocvd ProcessEngineeringCrystal Growth TechnologyApplied PhysicsSolid-state ChemistryCoordination CompoundsChemistryCrystallographyChemical Vapor DepositionCompound Semiconductor