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Apodized Silicon-on-Insulator Bragg Gratings
92
Citations
7
References
2012
Year
PhotonicsElectrical EngineeringApodization ProfileAccurate ControlEngineeringIntegrated PhotonicsApplied PhysicsSilicon-on-insulator Bragg GratingsDeep Uv LithographyPlanar Waveguide SensorGuided-wave OpticPhotonic Integrated CircuitProgrammable PhotonicsSilicon On InsulatorMicroelectronicsPhotonic DeviceOptoelectronicsNanophotonics
An accurate control of the apodization profile is still an issue for integrated Bragg grating filters fabricated in silicon-on-insulator because of the high modal confinement of these waveguides. In this letter, we present two fabrication-friendly apodization techniques that are compatible with deep UV lithography and can be used in mass-production of photonic-integrated circuits. These techniques are reliable even for weak effective index modulation amplitude, thus opening the door to the fabrication of long and elaborate grating structures.
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