Publication | Closed Access

Study of silicon incorporation from SiH4 in GaAs layers grown by metalorganic vapor phase epitaxy using tertiarybutylarsine

Electrical EngineeringEngineeringApplied PhysicsSilicon IncorporationGaas LayersMolecular Beam EpitaxySilicon On InsulatorEpitaxial GrowthOptoelectronicsCompound Semiconductor