Y-Ba-Cu-O Superconducting Films with High J_c Values by MOCVD using Ba-Addition Products

Abstract

Y-Ba-Cu-O superconducting films having high J c of 6.3×10 6 A/cm 2 at 77 K and T c of 92 K were prepared by metalorganic chemical vapor deposition using a new transport technique with Ba-addition products. This CVD method could realize stable vaporization and smooth transportation of Ba source material due to the increase of the evaporation rate at low sublimation temperatures. Consequently, good reproducibility for preparation of the high J c films (over 10 6 A/cm 2 ) was achieved.