Concepedia

Publication | Closed Access

The TiN/AlN multilayers deposited by filtered vacuum arc deposition

DOI

11

Citations

5

References

2003

Year

Xu Zhang, Xiangying Wu, Zhongzhen Yi, Tonghe Zhang, Huixing Zhang
Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

References

YearCitations

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