Publication | Closed Access
Deposition of thin films of different oxides of copper by RF reactive sputtering and their characterization
131
Citations
9
References
2000
Year
Materials ScienceMaterials EngineeringRf Reactive SputteringCopper Oxide MaterialsDifferent OxidesEngineeringCorrosionOxide ElectronicsSurface ScienceApplied PhysicsThin FilmsChemical DepositionChemical Vapor DepositionThin Film Processing
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