Publication | Closed Access
Improvements of plasma immersion ion implantation (PIII) and deposition (PIII&D) processing for materials surface modification
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Citations
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References
2012
Year
Materials EngineeringMaterials ScienceChemical EngineeringIon ImplantationEngineeringMaterials FabricationSurface ScienceSurface TreatmentSurface ProcessingPlasma Processing
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