Hydrogenation Effect on Electrical Behavior of Polysilicon Thin Films - Concepedia

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Hydrogenation Effect on Electrical Behavior of Polysilicon Thin Films

13

Citations

6

References

2014

Year

Beddiaf Zaidi, B. Hadjoudja, Baghdadi Chouial, S. Gagui, H. Felfli, Abdelghani Chibani

Materials ScienceElectrical EngineeringHydrogenation EffectEngineeringThin FilmsSilicon On InsulatorThin Film ProcessingElectrical Insulation

References

	Year	Citations

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