Publication | Closed Access
Ammonothermal growth of polar and non-polar bulk GaN crystal
38
Citations
9
References
2015
Year
Materials ScienceMaterials EngineeringX-ray Rocking CurveWide-bandgap SemiconductorHigh Temperature MaterialsEngineeringCrystalline DefectsHigh Growth RateAmmonothermal GrowthApplied PhysicsAluminum Gallium NitrideHigh PressureGan Power DeviceMicrostructure
SCAAT<sup>TM </sup>has been developed as a novel ammonothermal method which enables to obtain strain free, high quality and large size bulk gallium nitride (GaN) crystals under high pressure and high temperature super-critical ammonia. One of the unique features of this technique is relatively high growth rate of more than a few hundred micrometers per day toward polar and non-polar axis with excellent crystalline quality. The morphology, X-ray rocking curve, etch pit density and electric properties are presented.
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