ORMOCER®S – Inorganic-Organic Hybrid Materials for e/o-Interconnection-Technology

Abstract

Abstract Hybrid inorganic-organic polymers (ORMOCER®s) have been developed and tested for evaluation in optical and electrical interconnection technology. The photopatternable materials with negative resist behaviour are composed of inorganic oxidic structures cross-linked or substituted by organic groups. They are prepared from organosilane precursors by sol-gel-processing in combination with organic crosslinking of polymerizable organic functions. As a result of these functionalities the properties of the ORMOCER®s can be adjusted to particular applications. Systematic variation of composition combined with adaptation to micro system technology allows great flexibility in processing. The main features of these materials are: •Combined use as dielectric and passivation layers in electrical systems and devices as well as core and cladding for optical applications enables e/o applications with high integration levels.•Postbaking at moderate temperatures (120°C – 170°C) enables processing on low-cost substrates such as FR-4 and BT.•Easily adaptable to thin film technology: spin-on with planarisation >90% and via diameters down to 20μm have been achieved.