Thin Solid Films · 2004 · 41 citations · 13 references
EngineeringMaterials EngineeringMaterials ScienceElectronic MaterialsMaterials CharacterizationSensorsAluminum OxidesOxide SemiconductorsSensor MaterialsStrain EngineeringStrain SensorsThin Film StrainHigh-temperature StabilityPiezoresistive MaterialsPiezoresistive SensingPiezoresistive SensorsPiezoresistive Strain SensorsStrain Sensor MaterialsTemperature StabilityTin-doped Indium Oxide
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