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Influence of substrate temperature on mechanical, optical and electrical properties of ZnO:Al films

Materials EngineeringMaterials ScienceAluminium NitrideOptical MaterialsEngineeringMaterial AnalysisOxide ElectronicsMechanical EngineeringApplied PhysicsSubstrate TemperatureAl FilmsThin FilmsElectrical PropertiesThin Film Processing