Effect of nitrogen incorporation in CNx thin films deposited by RF magnetron sputtering - Concepedia

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Effect of nitrogen incorporation in CNx thin films deposited by RF magnetron sputtering

28

Citations

11

References

2002

Year

N. Mubumbila, Pierre‐Yves Tessier, B. Angleraud, G. Turban

Surface and Coatings Technology

Materials EngineeringMagnetismMaterials ScienceCnx Thin FilmsEngineeringBoron NitrideNanotechnologyApplied PhysicsRf MagnetronThin FilmsNitrogen IncorporationThin Film Processing

References

	Year	Citations

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