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Measurement of thermal diffusivities of thin metallic films using the ac calorimetric method
54
Citations
11
References
1997
Year
Ac Calorimetric MethodThermal DiffusivitiesThin Film PhysicsEngineeringThin Film Process TechnologyThermal ConductivityThermal AnalysisThermodynamicsThermal ConductionThin Film ProcessingMaterials ScienceMetallic Thin FilmsThermal TransportHeat TransferX-ray Diffraction MeasurementThin Metallic FilmsHigh Temperature MaterialsSurface ScienceApplied PhysicsThin FilmsThermal EngineeringThermal PropertyElectrical Insulation
The thermal diffusivities of thin films of evaporated metal less than 1×10−6 m thick have been measured using the light-irradiation ac calorimetric method. The thermal diffusivities of metallic thin films become smaller than those of the bulk as the thickness of the metallic thin films decreases. It is determined, using x-ray diffraction measurement, that the decrease of thermal diffusivity of thin films of evaporated metal is caused by a decrease in crystalline size.
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