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Molecular-dynamics simulations of crystal growth from melted Si: Self-interstitial formation and migration
25
Citations
40
References
2002
Year
Materials ScienceMolecular-dynamics SimulationsEngineeringPhysicsCrystal Growth TechnologySurface ScienceApplied PhysicsCondensed Matter PhysicsSiliceneDefect FormationTersoff PotentialAmorphous SolidSilicon On InsulatorCrystal FormationMolecular DynamicsSelf-interstitial Formation
Molecular-dynamics simulations of crystal growth from melted Si have been performed using the Tersoff potential to analyze the defect formation and migration processes. We observed that a five-membered ring generated at the solid/liquid interface initiated self-interstitial defect formation. The formation and migration energies of the obtained defect were calculated to be 3.85 and 0.94 eV, respectively. The sum of the calculated formation and migration energies, 4.79 eV, is in good agreement with the experimental activation energy of self-diffusion in crystal Si.
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