Electronic temperature compensation of clamped-clamped beam MEMS resonators

Abstract

An electronic system for temperature compensation of MEMS resonators is proposed. The system is based on a dual resonator compensation technique using thermal feedback. It allows for the implementation of a fully integrated solution, while minimizing the complexity of the compensation circuitry. Design methodologies are introduced along with analysis equations. The circuitry is implemented in 0.18 µm CMOS technology. The system exhibits a simulated temperature stability of ±0.74 ppm over a -45 °C to 85 °C temperature range, and has a power consumption of 181 mW.