Synthesis of the silicon and silicon oxide doped a-C:H films from hexamethyldisiloxane vapor by DC ion beam

V. Kopustinskas, Šarūnas Meškinis, Sigitas Tamulevičius, Mindaugas Andrulevičius, B. Čižiūte., Gediminas Niaura

Surface and Coatings Technology · 2006 · 36 citations · 19 references

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