Surface and Coatings Technology · 2006 · 36 citations · 19 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsInorganic ChemistrySurface ScienceChemical Vapor DepositionPhysical Vapor DepositionSemiconductor Thin FilmsSilicon MaterialsThin-film DepositionChemical Vapor Deposition MaterialsPhysical Vapor Deposition MaterialsSiliconSilicon ChemistrySilicon DioxideSilicon DopingSilicon Thin Films
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John Robertson · Materials Science and Engineering R Reports · 2002 · 6.1K citations
J. P. Conde, V. Chu, M.F. Da Silva et al. · Journal of Applied Physics · 1999 · 79 citations
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