Publication | Closed Access
High-rate deposition of Ta-doped SnO2 films by reactive magnetron sputtering using a Sn–Ta metal-sintered target
39
Citations
25
References
2011
Year
Materials EngineeringMaterials ScienceEngineeringOxide ElectronicsSurface ScienceApplied PhysicsTa-doped Sno2 FilmsHigh-rate DepositionThin Film Process TechnologyThin FilmsChemical DepositionReactive MagnetronThin Film Processing
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