Atomic and molecular layer deposition for surface modification - Concepedia

Concepedia

Publication | Closed Access

Atomic and molecular layer deposition for surface modification

20

Citations

30

References

2013

Year

Mika Vähä‐Nissi, Jenni Sievänen, Erkki Salo, Pirjo Heikkilä, Eija Kenttä, Leena‐Sisko Johansson, Jorma Koskinen, Ali Harlin

Journal of Solid State Chemistry

Materials ScienceEngineeringNanotechnologySurface ScienceSurface TreatmentMolecular Layer DepositionChemical DepositionSurface Processing

References

	Year	Citations

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