Resonant-cavity InGaAs/InAlGaAs/InP photodetector arrays for wavelength demultiplexing applications

Abstract

Resonant-cavity photodetector arrays are demonstrated in the InGaAs/InAlAs/InP material system grown by solid-source molecular beam epitaxy. To reduce crosstalk between channels, these devices are designed with a high-Q cavity to obtain narrow-band photoresponse. In addition, a novel double-absorber design has been proposed and implemented to avoid position sensitivity related to the cavity standing wave and eliminate the need for in situ cavity-mode adjustment. Both Schottky and P-i-N diode structures are studied and compared. Eight element arrays with linearly distributed resonant wavelengths spanning over 30 nm are fabricated by using a three-level anodic oxidation process. An experimental channel rejection ratio of 14.5 dB at 4 nm away from the resonant peak has been achieved.