Applied Optics · 2010 · 44 citations · 15 references
EngineeringMechanical EngineeringMechatronics EngineeringActuatorsFinite Element AnalysisRoboticsActuation SystemsActuator DesignActuator ModelingPiezoelectric ActuationPiezoelectric ActuatorsPiezoelectric MaterialsBimorph ActuatorsDeformable MirrorsFinite Element Model ValidationPiezoelectric Actuator ModelingPiezoelectric Bimorph ActuatorsPiezoelectric Elements
The actuator pattern of an adaptive mirror determines the amplitudes and the fidelities of the mirror deformations that can be achieved. In this study, we analyze and compare different electrode patterns of piezoelectric unimorph deformable mirrors using a numerical finite element model. The analysis allows us to determine the optimum actuator pattern, and it is also applicable to bimorph mirrors. The model is verified by comparing its predictions with experimental results of our prototype of a novel unimorph deformable mirror.
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