Publication | Closed Access
Measurement of the x-ray mass attenuation coefficient and the imaginary part of the form factor of silicon using synchrotron radiation
47
Citations
30
References
2003
Year
Form FactorX-ray SpectroscopyEngineeringPhysicsEnergy RangeSynchrotron Radiation ResearchSilicon On InsulatorX-ray DiffractionApplied PhysicsImaginary PartMass Attenuation CoefficientsAtomic PhysicsInstrumentationSynchrotron RadiationX-ray Extended-range TechniqueSynchrotron Radiation SourceX-ray OpticX-ray Imaging
We used the x-ray extended-range technique to measure the x-ray mass attenuation coefficients of silicon with an accuracy between 0.27% and 0.5% in the $5\mathrm{keV}\ensuremath{-}20\mathrm{keV}$ energy range. Subtraction of the x-ray scattering contribution enabled us to derive the corresponding x-ray photoelectric absorption coefficients and determine the absolute value of the imaginary part of the atomic form factor of silicon. Discrepancies between the experimental values of the mass attenuation coefficients and theoretically calculated values are discussed. New approaches to the theoretical calculation will be required to match the precision and accuracy of the experimental results.
| Year | Citations | |
|---|---|---|
Page 1
Page 1