Publication | Closed Access
Preparation of vanadium oxide thin films with high temperature coefficient of resistance by facing targets d.c. reactive sputtering and annealing process
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Citations
7
References
2006
Year
Materials ScienceMaterials EngineeringMaterial AnalysisEngineeringOxide ElectronicsSurface ScienceApplied PhysicsReactive SputteringThin FilmsChemical Vapor DepositionThin Film ProcessingHigh Temperature Coefficient
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