Multichannel Nomarski microscope with polarization modulation: performance and applications

Abstract

Using a two-dimensional CCD array, a photoelastic modulator, and a commercial Nomarski microscope, we built a differential polarization interferometer. Multichannel lock-in detection of the signal allowed us to reach a shot-noise limit corresponding to 5-pm path differences for a few seconds of recording time. This interferometer was used as a surface profilometer as well as a system for imaging through scattering media.